摘要
金刚石因具有优异的物理化学性能被认为是理想的刀具材料。硬质合金基底上涂覆CVD金刚石薄膜有利于改善刀具的加工性能和寿命,但涂层和基底之间存在热膨胀系数差异以及合金中Co对沉积有不利影响,使得薄膜附着力较差。本文综述了近几年来各种提高CVD金刚石涂层刀具切屑性能的方法,从提高薄膜附着力和改善金刚石膜的质量两个方面进行了讨论。并介绍了国外较先进的CVD金刚石涂层刀具的应用,随着技术的不断成熟,CVD金刚石涂层将会有更为广泛的应用。
Diamond is considered as an ideal cutting tool material due to its excellent physical and chemical properties.CVD diamond films coated on cemented carbide can lead to significant improvements in the life and processing performance of cutting tools.However,the large difference of thermal expansion coefficient is found between coating and substrate,and Co in cemented carbide is also disadvantageous to diamond deposition,which results in poor adhesion to substrate.In this paper,various methods in improving the performance of CVD coated diamond tools are described.In details,we discuss about how to improve coating adhesion and diamond quality respectively.Finally,the application of advanced foreign techniques in CVD diamond coating tools are introduced as well.CVD diamond coated tools will have wider application with the development of the technique.
出处
《硬质合金》
CAS
北大核心
2011年第5期321-331,共11页
Cemented Carbides
关键词
硬质合金
化学气相沉积
金刚石薄膜
过渡层
cemented carbide
Chemical Vapor Deposition(CVD)
diamond films
interlayer