摘要
Based on the sensing mechanism of microsensor, a simulation model of a practical silicon beam resonator attached to an E-type round diaphragm and used for measuring concentrated force is established. The relationship between the basic natural frequency of the beam resonator and the concentrated force is calculated, analyzed and investigated. As a microsensor FEM is used to study some important simulation results on the vibration features of the beam resonators. Based on the differential output signals, a set of optimum parameters of the proposed sensing unit is determined.
Based on the sensing mechanism of microsensor, a simulation model of a practical silicon beam resonator attached to an E-type round diaphragm and used for measuring concentrated force is established. The relationship between the basic natural frequency of the beam resonator and the concentrated force is calculated, analyzed and investigated. As a microsensor FEM is used to study some important simulation results on the vibration features of the beam resonators. Based on the differential output signals, a set of optimum parameters of the proposed sensing unit is determined.
