摘要
荷电效应是导致扫描电子显微镜(SEM)图像产生缺陷最重要原因之一,它会使SEM图像出现异常反差、畸变、像散、亮点与亮线等.该文通过对同一种实验材料采用不同实验条件所得图像进行对比分析,详细阐述了荷电效应产生的机理,对SEM图像的影响以及解决方法.
Electric charge effect is one of the most important reasons for limitation of SEM images.It will induce abnormal contrast,aberrance,astigmatism,light line,etc.In this paper,we discuss the mechanism of electric charge effect,analyze the reasons for it,and show the ways to solve it.
出处
《湛江师范学院学报》
2008年第6期33-35,共3页
Journal of Zhanjiang Normal College
关键词
荷电效应
扫描电子显微镜
像散
electric charge effect
scanning electron microscope
astigmatism
