三振镜光扫描系统设计

The Design of an Optical Scanning System of Three Galvanometers

根据几何光学原理,设计了一个高精度、多功能的三振镜光扫描系统。系统性能优于二振镜系统,定位精度±7μm。

We designed an optical scanning system consisted of three galvanometers on prin-ciple of the geometrical optics.The characteristics of the system are high accuracy and multifun-lion.The performance of the system is better than two galvanometer system,and the positionaccuracy is±7μm.