光学元件抛光亚表面损伤实验研究

Research on the Subsurface Damage during Finishing for Optics

设计光学元件抛光亚表面损伤检测实验,使用原子力显微镜(AFM)检测传统抛光亚表面塑性划痕与磁流变抛光亚表面塑性划痕的最大深度,通过比较验证磁流变抛光对亚表面塑性划痕的抑制能力;同时利用二次离子质谱仪的深度剖析功能检测磁流变抛光石英样件后表面水解层的深度,指出磁流变抛光属于低损伤性抛光技术。

Designing measured experiment about the subsurface damage during finishing for optics,using atomic force microscope (AFM) measure the depth of subsurface cracks (SSD) through traditional finishing and magnetorbeological finishing (MRF),comparing the two results and verifying the ability of MRF on controlling SSD.We also measure the depth of hydrolyzed layer and make that compared with traditional finishing,magnetorheological finishing can bring shallower hydrolyzed layer but new impurity,belonged to low-damage finishing.