摘要
介绍了纳米测量的必要性及特殊性,并介绍了几何量纳米测量的基本方法及仪器。
Geometrical parameter metrology have been into nanometer space.The necessity, peculiarity and key technology of nanometrology were discussed,and basic method and instrument using geometrical parameters for nanometrology were introduced.
出处
《航空精密制造技术》
2008年第4期1-5,共5页
Aviation Precision Manufacturing Technology
关键词
几何量
纳米技术
纳米测量
干涉仪
geometrical parameter
nanotechnology
nanometrology
interferometer
