准分子激光电化学刻蚀金属的研究

Study on excimer laser-induced electrochemical etching metal

为了探寻准分子激光电化学刻蚀工艺的特性,采用功率密度大的248nm准分子激光聚焦照射浸在溶液中的金属表面,实现了一种激光电化学刻蚀复合工艺。在实验的基础上,通过对激光电化学刻蚀金属和硅的基本形貌进行比较和分析,研究了该工艺的工艺特性。研究结果表明,该复合工艺为激光直接刻蚀和激光热诱导电化学刻蚀。其中激光热诱导电化学刻蚀是通过激光的光热效应和由激光诱导的冲击波来实现对腐蚀液和材料的冲击、微搅拌等作用的。

In order to further understand behavior of laser-induced electrochemical etching process,the experiments of micromachining metal by laser-induced electrochemical etching are carried out.The 248nm excimer laser is adopted as light source.Based on the results of experiments,the technics characteristic of laser electrochemical etching is researched by comparing and analyzing the basic etching appearances of metal and silicon.It is verified that compound technics is made up of laser etching and laser photothermal effect which helps to induce electrochemical dissolution.The laser enhanced photothermal process roots in laser photothermal effect,the shock of laser-induced shock-wave to liquid and material,and micro stirring.