利用EBIC测定GaP LPE样片的少子扩散长度

Diffuse length of few carrier running electron for determining GaP LPE sample flat by use of EBIC

对电子束入射方向与结面平行情形中电子束感生电流(EBIC)曲线线形进行了理论分析.阐述了E-BIC的基本原理和计算方法,并利用EBIC对一组GaP绿色LED用LPE样片进行少子扩散长度测量.

First,it has been analyzed that linear of EBIC curve in theory in the middle of situation that paralleled between incident direction of electron beam and combination plane.It is expounded that basic principle and calculate method,and diffuse length of few carrier running electron for GaP LPE sample flat by use of EBIC is determined.