摘要
分析了微机电系统中静电-结构耦合的拉入(pull-in)特性,比较了牛顿迭代法、松弛法、有限元/边界元混合法等方法求解静电-结构耦合问题的各自特点。
Coupled electro-mechanical behavior is an important characteristic of electrostatic microelectromechanical system(MEMS) actuators.Comparisons of Newton iteration algorithm,relaxation method and combination of finite element method and boundary element method are described in solving the electro-structure coupled domain.
出处
《航空精密制造技术》
2005年第5期48-50,共3页
Aviation Precision Manufacturing Technology
关键词
微机电系统
力电耦合
拉入电压
牛顿迭代法
microelectromechanical system
mechanical-electrical coupling
pull-in voltage
Newton iteration algorithm
