摘要
在表面测量中,对于触针式仪器需求相当大,因为触测法对斜率不敏感,测量结果具有高度的逼真性,这使它适用于测量同时含有形状与纹理参数的复杂物体.但是由于它测量速度相对较慢,在某些场合会形成劣势.本文阐明可以通过优化阻尼因数来提高横向移动速度,通过建立能够确定触针是否承受过压的判据,使触针不会引起表面损伤.
There is a considerable requirement for the measurement of surfaces using stylus methods because of their high fidelity and insensitivity to surface slope which makes them suitable for measuring complex objects involving both form and texture.However,they are sometimes criticised because of their relatively slow measuring speed.It is explained in this paper how it may be possible to increase the traversing speed by optimizing the damping factor and that it is possible to ensure against stylus damage of the surface by means of a criterion which warns of excess stylus pressure.
出处
《纳米技术与精密工程》
CAS
CSCD
2011年第4期283-290,共8页
Nanotechnology and Precision Engineering
关键词
表面计量
集成阻尼
随机表面
surface metrology
integrated damping
random surfaces
