离体电生理检测微电极阵列传感器的设计与制备(英文)

Design and Fabrication of Microelectrode Array Sensor for Electrophysiological Recording in Vitro

针对动物离体组织电生理检测的实际需求,设计并制备了一种以载玻片为基底,以微电极阵列为敏感元件,并将灌流装置集成一体的传感器芯片.采用微电子机械系统(MEMS)技术中的薄膜工艺完成了微电极阵列的制备,其导电层和绝缘层分别是铂和氮化硅.采用聚二甲基硅烷(PDMS)浇铸制成埋有管道的方形灌流槽.该传感器可保持离体组织的生理活性,同时实现电生理信号的64通道同步记录.整个芯片结构紧凑,接口简单,使用方便.对芯片的电学性能进行了研究,结果表明,通过在微电极表面电镀修饰铂黑,可有效降低其交流阻抗,提高信噪比.

A sensor chip was designed and fabricated on one glass slide substrate which integrated a perfusion device and a microelectrode array as sensitive component.The chip can be used for electrophysiological recording of in vitro animal tissue.The 64-channel microelectrode array had a platinum conductive layer and a silicon nitride insulating layer,which were fabricated by thin-film process of micro electro mechanical systems（MEMS） technology.Poly dimethyl silane（PDMS） was cast to form the square shaped perfusion chamber with pipelines buried inside.The perfusion device can help maintain physical activity of the in vitro tissue during simultaneous recording of the 64-channel electrophysiological signals.The sensor chip has compact structure,simple interface and is easy to use.The electrical performance of the chip was studied,and results show that platinum plating modification can reduce the AC impedance and raise the signal noise ratio effectively.