摘要
Pulsed KrF lasers of two different durations (30 ns, 500 fs) are used to deposit DLCfilms. By optical emission spectroscopy and ion probe, the composite species of laser generated plas-ma plume are identified, the average kinetic energy of ions, the plume flux and their variation with laserenergy density, and the distance from the target are investigated. The relation of the properties of de-posited films with the plasma characteristics is studied.
Pulsed KrF lasers of two different durations (30 ns, 500 fs) are used to deposit DLC films. By optical emission spectroscopy and ion probe, the composite species of laser generated plasma plume are identified, the average kinetic energy of ions, the plume flux and their variation with laser energy density, and the distance from the target are investigated. The relation of the properties of deposited films with the plasma characteristics is studied.
