利用图像处理技术自动评价超光滑表面的清洁度

Automatic Gauging of the Precision Surface Cleanliness with Computer-aided Picture Processing Technique

讨论了利用计算机图像处理技术对精密抛光基片表面清洁自动评价的可能性、优点及应用前景。

In this paper, a new method, whose key technique is computer-aided picture processing, is introduced to gauge the cleanliness of polished precision surfaces automatically. Its possibility, advantages and prospects are also presented.