摘要
随着精密加工技术、测量和分析手段，及计算机科学的深入发展．对微纳米表面和表层完整性的评价日趋强烈。本文概括性地初步探讨了表面完整性评价时涉及到的具体评价性能和检测方法，并对几种常用的表面性能的检测方法和仪器进行了综述。
In this paper, the evaluating parameters and mesuring techniques involved in the assessment of sur face and subsurface integrity have been discussed briefly. Moreover, some methods and instruments for mea saring surface properities are presented.
出处
《航空精密制造技术》
2000年第3期6-11,共6页
Aviation Precision Manufacturing Technology
关键词
超精密加工
微纳米表面
完整性
ultra-precision machining
micro-nano surface
integrity
