超磁致伸缩薄膜材料及其应用

Giant magnetostrictive thin film and its application

超磁致伸缩薄膜是一种应用于微型机电系统及传感器的新型材料 ,它具有很高的机电耦合系数、较高的响应速度以及非接触式驱动等优点。对磁致伸缩薄膜的研究现状进行了综述 ,介绍了磁致伸缩薄膜的制备方法 ,性能特征及应用前景。

Giant magnetostrictive thin films present a new and interesting way to realize new actuator and sensor in microelectromechanical systems as they combine high energy output, high frequency and contactless operation. The current status in this field was reviewed and the preparation methods, the characterization and application of magnetostrictive thin films were introduced.