摘要
总结了常用非球面光学元件的检验方法的分类及其特点，提出了满足大口径高次非球面的高精度检测方法的基本要求，重点分析了细光束干涉测试方法及其在大口径非球面高精度检测方面的应用．
The classification and the characteristics of the detection methods for commonaspherical optical elements are summarized. The basic requirements of the high precisiondetection method for high-order aspheric surface with large aperture are put forward. Thepaper pays attention to the thin beam interferometric method and its application in highprecision detection of large aperture aspheric surface.
出处
《光电工程》
CAS
CSCD
1999年第S1期1-6,共6页
Opto-Electronic Engineering
基金
中科院出国留学回国人员择优支持基金
关键词
面形测量
非球面
细光束干涉术
Surface shape measurement Aspheric surface, Fine Beam interferometry.
