硅集成微型泵系统的优化设计和兼容工艺研究

Optimization and process compatibility of silicon integrated micropump system

介绍了一种新型硅集成微型泵系统的工作原理、结构优化、电路设计、制作工艺流程和初步的实验结果。该系统为三片式结构，其中两片由体硅微机械加工技术形成，构成微止回阀门，另一片为集成铝硅双金属驱动结构。驱动结构的结构参数得到了优化设计，提高了工作效率。利用铝硅双金属驱动结构制作工艺的特点，在驱动结构上集成制作了微流量传感器和信号处理电路，实现了系统集成。该集成系统的制作工艺简单，所采用的微机械加工工艺与标准ＭＯＳ工艺完全兼容。集成微型泵的外形尺寸为６ｍｍ×６ｍｍ×１ｍｍ，最大输出背压力为１０ｋＰａ，最大流量可达到４４μＬ／ｍｉｎ。

The principle, structure optimization, circuit design, fabrication processing and preliminary experiments of a novel silicon integrated micropump system are presented. This integrated system consists of two passive check microvalves, which are fabricated using bulk silicon micromachining techniques, and one bimetallic actuator with integrated microflow sensors and signal process circuits. The structure parameters are optimized and applied to design the actuator so that its performance is improved dramatically. The preliminary results show that the fabrication processing is very simple and fully compatible to standard IC fabrication technology. The dimension, maximum output pressure and maximum pumping yield of the system are 6mm×6mm×1mm, 10kPa and 44μL/min respectively.