台面结构硅光电集成微电动机的设计

Design of mesa structure wobble micromotor with optical electronic IC

为了解决凸极法兰盘结构的静电晃动微电动机寿命短和测速范围窄的问题，提出了一种台面结构的光电集成晃动微电动机。用单晶硅台面法兰盘代替悬浮的厚１．１μｍ的多晶硅法兰盘，它具有机械强度高、摩擦因数小、抗磨损、不塌陷等优点。电动机的轴也用实心轴取代厚２μｍ的空心轴，克服了轴因磨损和受力而变形的问题。使得电动机的寿命大为提高。另一方面，在电动机上还集成了光电测速电路，扩大了测速范围，测量精度也得到了提高。并且还可以形成闭环控制系统，或用作斩光器，成为真正的微机械电子系统。新型电动机工艺简单，与ＩＣ工艺完全兼容，可批量制作。

In order to increase the operation lifetime and expand the range of the velocity measured, development of a mesa structure wobble micromotor with optical electronic IC was reported.The mesa flange bearing of the micromotor was made of single crystal silicon instead of polysilicon (1.1μm) in the salient flange bearing micromotor. As a result, the mesa flange motor shows superior performance, such as higher strength, smaller frictional coefficient, more difficult worn and solid in structure. A solid axle instead of the hollow center axle whose thickness was 2μm in the mesa flange micromotor, so that the deformation of axle from wearing and force suffering was eliminated. The lifetime of the micromotor was improved. Moreover, an optical electrical IC for measuring rotative velocity of the micromotor was integrated in the micromotor, which could also be used as close loop control system or chopper light. Therefore, it is possible to manufacture the proper microelectromechanical systems by this process, which is simple and compatible with IC process.