FeCuNbSiB单层膜和三明治膜的磁特性与巨磁阻抗效应

MAGNETIC PROPERTIES AND GIANT MAGNETO IMPEDANCE EFFECTS OF FeCuNbSiB SINGLE LAYERED AND SANDWICHED FILMS 

用射频溅射法制备了Ｆｅ７３ ．５Ｃｕ１Ｎｂ３Ｓｉ１３．５Ｂ９ 单层膜和Ｃｕ 或Ａｇ 作为中间层的三明治膜．溅态膜为非晶态结构．磁畴观察结果表明，单层膜在３８０ ℃退火后，呈现均匀磁化的纳米晶结构，该样品软磁特性最佳，其巨磁阻抗效应最大，在１３ ＭＨｚ ，最大磁阻抗比纵向为１８ ％ ，横向为１４ ％ ．溅态三明治膜具有较大的巨磁阻抗效应，在１３ ＭＨｚ ，Ｃｕ 夹层三明治膜的最大磁阻抗比纵向为３２ ％ ，横向为１１ ％ ，Ａｇ 夹层三明治膜的最大磁阻抗比纵向为４７ ％ ，横向为５７ ％ ．Ｃｕ夹层三明治膜经２５０ ℃退火后，在低频下表现为巨磁电感效应，在１００ ｋＨｚ，最大磁电感比为１７３３ ％ ．

Magnetic properties and giant magneto\|impedance (GMI) effects of Fe 73.5 Cu\-1Nb\-3Si 13.5 B\-9 single layered films and sandwiched films using Cu or Ag as the central layer prepared by radio frequency sputtering are investigated.The as\|deposited single layered films are in amorphous state.The domain structures of single layered films annealed at 380℃ show that the films are in nanocrystalline state with homogeneous magnetization.The samples possess excellent soft magnetic properties and have the maximum values of GMI effects,the maximum GMI ratios are 18% and 14% in longitudinal and transverse fields,respectively,at 13?MHz.Sandwiched films in the as\|deposited state possess large GMI effects,the maximum GMI ratios of sandwiched films with a Cu central layer are 32% and 11% for longitudinal and transverse cases,respectively,and those of sandwiched films with a Ag central layer are 47% and 57% for longitudinal and transverse cases,respectively.Sandwiched films using Cu as the inner layer annealed at 250℃ exhibit large magneto\|inductance effect at low frequencies.The maximum magneto\|inductance ratio is 1733% at 100?kHz.