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Change Laws of Flake's Temperature during Making a Diamond Film by DC-PJ

Change Laws of Flake's Temperature during Making a Diamond Film by DC-PJ
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摘要 When making a diamond film by direct current plasma jet, a kind piece of flake is used as a base body Which the film can beattached to. The flake's temperature is unstable. Therefore, some experiments and constructed mathematical models, which were solvedby computer, were done. The results show that the flake's temperature is influenced by many factors and the mains are plasma jet powerand vacuum pressure. Through adjusting the two parameters, the flake's temperature can be accurately controlled, furthermore, diamondfilms' quality would be improved. Lowering sediment platform's temperature has a little effect to the flake's temperature at present technology conditions. When making a diamond film by direct current plasma jet, a kind piece of flake is used as a base body Which the film can beattached to. The flake's temperature is unstable. Therefore, some experiments and constructed mathematical models, which were solvedby computer, were done. The results show that the flake's temperature is influenced by many factors and the mains are plasma jet powerand vacuum pressure. Through adjusting the two parameters, the flake's temperature can be accurately controlled, furthermore, diamondfilms' quality would be improved. Lowering sediment platform's temperature has a little effect to the flake's temperature at present technology conditions.
出处 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 1999年第2期97-102,共6页 矿物冶金与材料学报(英文版)
关键词 CVD (Chemical Vapor Deposition) plasma impact heat transfer CVD (Chemical Vapor Deposition) plasma, impact heat transfer
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