摘要
对用于超精密机床传动的滚珠丝杠的微动特性进行了实验研究，建立了它的数学模型，并在此基础上，进行了超精密位置伺服控制实验。实验结果表明。
In this paper, the micro dynamics of ball screws used in the drive of super-precision machine tools is studied. Its mathematical model is also set. Based on this, the servo control experiment of the super-precision positioning is done. Experiments identify that adopting micro dynamics of ball screws can make nanometer positioning into reality.
出处
《航空精密制造技术》
1998年第6期9-11,共3页
Aviation Precision Manufacturing Technology
关键词
超精密机床
伺服控制
微动特性
super-precision machine tool servo control micro dynamics
