高速精密激光干涉测量的研究现状及其关键技术

The Present State of High speed and High accuracy Laser Interference and Its Key Techniques

总结了高速精密激光干涉测量的研究现状；分析了影响测量精度和提高测量速度的主要因素及解决问题的关键技术，包括激光稳频技术和光学反馈、精度与测速的制约关系、空气折射率的影响及补偿、电子细分技术。

This paper summarizes the present state of high-speed and high-accuracy laser interference. Then it analyses the main factors affecting measuring accuracy and key techniques that can improve measuring speed including laser frequency stabilizationt echnology, optical feedback, the restrict relationship between measuring accuracy and measuring speed, the influence and compensation of air refractivity, optical nonlinear error, etc.