超精密CNC平面磨床在线测量、补偿加工及对刀功能的自动化实现

Automation Achieving of Measurement on Ling、Compensation Machining、Automaticity of Grinding Fitting on Ultraprecision CNC Face Grinder

介绍了大型超精密ＣＮＣ平面磨床测量控制系统设计中多传感器在线检测、导轨误差补偿加工以及超精密磨削对刀等特殊功能的实现方法，并将其纳入ＣＮＣ的Ｍ功能指令系统。

This paper introduces the methods of special functions of multi-sensor measuremeut on line.compensation machining of guide errors and ultra-precision grinding fitting etc.which were used in the large ulrta-precision CNC face grinder,and put these functions into M function control system of CNC,achieved automaticity of ultra-precision face grinding.