定偏心锡磨盘超精密抛光均匀去除模拟计算

The Homogenous Dislodging of Locating Ecoentric Tin lap’s Precision Polishing and Its Analog Calculation.

通过对被研磨工件与锡磨盘相对运动轨迹方程的建立、模拟和计算，从理论上分析了影响获得超光滑金属表面（Ｒａ０５ｎｍ）的重要因素，以及如何选择运动参数。

This paper deals with the formation,simulation and calculation of the relatively motive path equation between samples and Tin lap.Then it analyses the key elements influencing on the acquirement of su per smooth metal flat and the problem of how to choose motive parameters.