平面步进电机超精三坐标控制系统

An Super-precision 3D Control System which using Planar Stepping Motor

简介了一种用平面步进电机作为执行元件的超精三坐标控制系统的基本结构、原理及实现方法。该系统采用了全新的步进电机控制方式、多坐标动态激光测量系统、高性能计算机控制等技术，可实现极高的坐标定位精度。系统在超大规模集成电路制造等现代微纳米技术中具有重要的实用价值。

In this paper,the main configuration,the principle of operation,and the way of realization of a super-precision 3D coordinate control system using planar stepping motor as driving power unit is briefly presented.This system can have super high positioning accuracy by engaging various advanced technologies,such as new control method of stepping motor,multi-axes dynamic laser positioning system,high performance computer control,etc.It has great application value in the development of micrometer and nanometer technology especially in the manufacturing of SLSI.