激光陀螺超高反射镜基片抛光工艺

采用新型双层结构沥青抛光模和两种抛光粉（CeO2和Fe2O3）分步抛光工艺，在合理选择抛光工艺参数的条件下，实现了微晶玻璃激光陀螺反射镜基片的超精密抛光，表面粗糙度达到Ra＜0．5nm、面型精度N＝0．5、△N=0，1．

With the reasonable choice of processing parameters, a new type pitch polisher with two layers and the two-stage polishing technology using two kinds of polishing powder(CeO2 and Fe2O3)separately have been applied to the precision polishing of microcrystalline-glass-based reflector of laser-gyro. Super -smooth reflectors of 0.5nm rms or less surface roughness and 0.136μm or less profile error have been achieved.