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非球面零件超精密加工技术 被引量:2

Super Precision Machining Technology of Aspheric Spares
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摘要 介绍了非球面零件超精密切削、超精密磨削、超精密抛光(研磨)、等离子体的CVM、复制等技术的超精密加工方法. This paper introduces the ultra-precision machining technlogy of aspheric spares, including ultra- precision cutting, ultra-precision grinding, ultra-precision polishing or lapping, CVM of plasmas and copying technology.
作者 杨福兴
出处 《航空精密制造技术》 1997年第5期4-7,47,共5页 Aviation Precision Manufacturing Technology
关键词 非球面 切削 磨削 抛光 复制 aspheric cutting grinding polishing copying
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同被引文献13

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  • 6ZONG W J,LI Z Q,SUN T,et al.The basic issues in design and fabrication of diamond-cutting tools for ultra-precisionand nanometric madining[].International JMadine Tools and Manufacture.2010
  • 7ERICKSON D J,JOHNSTON R A,HULL A B.Optimization of the optomechanical interface employing diamond machi-ning in a concurrent engineering environment[]..1992
  • 8EDMUND W A.Diamond turning assisted fabrication of a high numerical aperture lens assembly for 157 nm microlithog-raphy[]..2003
  • 9YODER P R,Jr.Opto-Mechanical Systems Design[]..
  • 10H. S. Kim,E. J. Kim,and B. S. Song.Diamond Turning of Large Off-axis Aspheric Mirrors Using fast tool servo with On-machine Measurement[].Journal of Materials.2004

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