平面度的在线检测及补偿方法的研究

A Study on the On-line Measurement and Control-compensated Approach for the Flatness

叙述运用四测头进行在线测量，采用最小二乘逐次两点法将工件形状误差和导轨运动副误差分离出来，采用电致伸缩陶瓷元件设计了一套补偿用微量位移装置，根据分离出来的导轨运动副误差，由FAGOR8025M控制器产生控制电压控制砂轮进给的位移量，进行在线补偿加工。分离平面度重复精度优于4％，微量进给装置的位移分辨率可达0.01μm。

This paper introduces the on-line measurement with four sensors. The least-square serial two-point method is adopted to separate the guide motion pair error form the workpiece form error. The electrostrictive ceramic parts are applied in the design of a control -compensated micro-displacement mecharism.According to the guide motion pair error, the voltage controlling the wheel displacement can be created by the FAGOR8025M controller and the on -line compensated machining will be implemented. It has been shown that the accuracy of measurement error is less than 4% and the resolution micro- displacement mechanism is up to 0.001μm.