应用于超精密测量的电容传感器

针对用调频测量法的电容传感器在实际使用中存在的体积大，漂移大等问题提出了一系列的解决办法，并对改进后的传感器进行长短期稳定性实验及标定。实验结果表明，在体积大大减少的情况下，分辨率及稳定性都保持相当好的水平，同时也给出了一种测量传感器输出频率的新颖的高速计数电路。

A series of solutions to the problems of big volume and drift existing in the capaitance type sensor with frequency modluation circuit have been provided. The long and short term stability experiment and the calibration have been carried out on the improved sensor. The experiment results show that the resolution and stability can be kept well with the great decrease of sensor volume Meanwhile, a novel high-speed counting circuit for the ontput frequency of measuring sensor has been presented.