现代超精密加工技术

在介绍传统起精密加工技术的基础上，首先对现代起精密加工技术特别是纳米级加工以及纳米级测技校本进行了介绍．此外还介绍了现代科故发展中应用日趋广泛的典型零件非球而曲面和精密偶件的越精密加工技术．

In this Paper modem ultraprecision machining technology, especially nanometer machining and nanometer measurement and controlling technology is introduced on the basis of traditional ultraprecisionmachining technology. Moreover, ultraprecision machining technology of typical parts──aspheric surface and precise match components, which are being applied extensively in the modern science and technology, is alsopresented.