摘要
在微机械领域常需用到有一定厚度、高深宽比的微金属结构,准LIGA工艺是制作这种微结构的一种简易、方便的手段。准LIGA工艺的工艺过程与LIGA工艺基本相同,只是不需用同步放射X线源,而利用常规的紫外光刻设备和掩膜在光敏材料上光刻形成模子,再电铸金属形成金属结构。该技术已在微机械制作中得到了应用。
High aspect ratio and thick metallic microstructures are frequently required in MEMS. The quasi-LIGA process is a low-cost fabrication technique for these metallic microstructures based photolithography and electroforming.This process is very similar to LIGA process with exception of using a conventional UV-light exposure equipment.The technique has been widely used in micromachining.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1996年第S1期84-87,共4页
Chinese Journal of Scientific Instrument
基金
优秀年轻教师基金