准LIGA工艺

QUASI-LIGA PROCESS──A Metallic Microstructures Fabrication Technique Based Lithography and Electroforming

在微机械领域常需用到有一定厚度、高深宽比的微金属结构，准ＬＩＧＡ工艺是制作这种微结构的一种简易、方便的手段。准ＬＩＧＡ工艺的工艺过程与ＬＩＧＡ工艺基本相同，只是不需用同步放射Ｘ线源，而利用常规的紫外光刻设备和掩膜在光敏材料上光刻形成模子，再电铸金属形成金属结构。该技术已在微机械制作中得到了应用。

High aspect ratio and thick metallic microstructures are frequently required in MEMS. The quasi-LIGA process is a low-cost fabrication technique for these metallic microstructures based photolithography and electroforming.This process is very similar to LIGA process with exception of using a conventional UV-light exposure equipment.The technique has been widely used in micromachining.