集成硅微机械光压力传感器的研制工艺

The Developing Frabrication for Integrated Micro-Mechanical Silicon Optical Pressure Sensor

本文系统地介绍了一种新颖的硅微机械光压力传感器系统的特殊制造工艺。在工艺实验的基础上，对硅微弹性膜、获取传输光信息的ＳＩＯ。一ＳＩＯＮ—ＳＩＯ。条形光彼导、光电探测器、金属布线以及传感器的一体化等工艺技术进行了较深入的研究，并对实验结果进行了分析讨论，提出了有效的工艺方法，为这类微型光机电传感器系统的集成化研究打下了较好的实验基础。

In this paper,a special frabrication for making novel integrated micromechanical silicon optical pressure sensor is systematically presented,On the basis of technological experiments,the thin silicon membrane, the wave guide of for transmissing optical signal, the photoelectric detector, the metal electrode and the integrating technology are deeply investigated, and experimental results are analysed in detail. The good process is presented. These investigations have laid a better experimental base for the development of micro-opto-electro-mechanical sensor systems.