摘要
介绍用于纳米技术中的微型零件三维几何尺寸测量系统的原理,测量中的关键技术,对该系统进行了实测,实验结果表明:x,y重复测量精度为±0.005μm,z方向测量精度为5nm。
A new 3-D measuring system for microelement is presented in this paper. The operation principle and the key point of this method is described. The measurement results show that the repeatability in X and Y direction is 0. 05μm,the contrast of the image is better than 0. 8,and measurement accuracy is 5 nm.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1996年第S1期319-321,326,共4页
Chinese Journal of Scientific Instrument