微型零件三维几何尺寸测量系统

3-D measurement for microelement

介绍用于纳米技术中的微型零件三维几何尺寸测量系统的原理，测量中的关键技术，对该系统进行了实测，实验结果表明：ｘ，ｙ重复测量精度为±０．００５μｍ，ｚ方向测量精度为５ｎｍ。

A new 3-D measuring system for microelement is presented in this paper. The operation principle and the key point of this method is described. The measurement results show that the repeatability in X and Y direction is 0. 05μm,the contrast of the image is better than 0. 8,and measurement accuracy is 5 nm.