极坐标激光直接写入系统研究

Investigation of Polar Coodinate Laser Direct Writer

本文对极坐标激光直接写入系统进行了初步的研究，介绍了它的原理及结构，该系统可用于二元光学掩模的制作，具有加工孔径大、线宽小的特点，特别适用于圆对称的图形。加工此类图形在制作时间、成本、元件质量等方面都优于电子束曝光机。

A polar coordinate laser direct write system has been investigated,this system is capable of fabricating binaryoptics masks with large aperture and small linewidth.It is compatible for centro-symmetic subset of binary optic patterns. High quality components can be fabricated quickly, easily and at low cost.