与光学显微镜结合的原子力显微镜及其冲击式微位移机构

Atomic Force Microscope combined with Optical Microscope and Impact Driving Mechanism

本文报道与光学显微镜（ＯＭ）结合的原子力显微镜（ＡＦＭ）及其冲击式微位移机构（ＩＤＭ），采用ＯＭ及ＣＣＤ摄像机，可在５５０μｍ×４５０μｍ范围内监控微悬臂和样品，通过ＩＤＭ机构可将样品以０．５μｍ的步距在１０ｍｍ×１０ｍｍ范围内作二维移动。仪器最大扫描范围３μｍ×３μｍ，最高分辨率为纳米级。文中给出了获得的部分样品测试结果。

In this paper, an atomic force microscope combined with opticalmicroscope (OM) and the impact driving mechanicm for micro displacement arereported. Using OM and CCD camera, the micro cantilever and sample can bemonitered in the range of 550pmX 450# m, The sample can be moved in two dimensions with the step of 0. SUm by the IDM. The maxmum scanning range is 3pmX 3Urn, the resolution is about 1 urn. Some images obtained by our microscope are given.