摘要
椭圆偏振测量技术是研究表面和薄膜的一种光学技术。这一技术被广泛应用于物理学、化学、材料、生物、电子、机械、冶金和生物医学等领域。计算机和计算技术的产生与发展加速了椭圆偏振技术的发展，自动化的快速测量扩展了这一技术的应用领域，也使这一技术更为实用化，同时也可对更为复杂的研究对象进行测量；而具有连续波长的椭偏仪的出现以及波长范围的扩展，使能在宽广的波长范围研究物质的色散关系，并能进一步提供对电子能谱结构的了解。本文评述了这一技术的发展和应用。
Ellipsometry is a kind of optical technology used in surface and thin film studies.It is widely used in the fields of physics,chemistry,material science,biology,electronics,mechanical engineering,metallurgy and biomedicine.Because of the development of computer and numerical analysis,ellipsometry was improved rapidly,its application field was spread,and became more practical.Now,a variety of complex structures can be measured by this method.The dispersion relation and the electron energy spectrum of material can be studied by means of the spectroscopic ellipsometer with continuous wave length.In this paper,the development and application of ellipsometry as well as its situation in our country are reviewed and discussed.
出处
《华南理工大学学报（自然科学版）》
EI
CAS
CSCD
1996年第S1期48-53,共6页
Journal of South China University of Technology(Natural Science Edition)
关键词
椭圆偏振
薄膜测量
椭偏仪
ellipsometry
thin film measurement
spectroscopic ellipsometer
