激光精密打孔中工件气氛的实验研究

Experimental Study of working atmosphere on laser five drilling

本文研究了工件材料处在不同真空度及氧气介质条件下对激光精密打孔的影响。实验表明，对于一般加工材料诸如陶瓷、不锈钢、碳钢等，随着工件周围真空度的提高，击穿某一厚度工件材料所需的激光最少脉冲次数明显减少，当工件周围处于某一负压下，激光打孔质量有明显改善。工件周围充气时能降低材料的汽化阈值，且打穿工件材料所需要的激光最少脉冲数也有所下降。

In this paper,we study experit-nentaly the effect of working for different degree of vacuum and oxygen medium conditions in laser fine drilling. The experiment shows that, for general working materials such as ceramics、 stainless steel, carbon steet, etc, as increasing of the degree Vacuum of working periphery, the least order nlember of laser pulse for breakdown of working materials at certain thickness have been obviously reduced. For cetain negative pressure of working peripherg, the quality of working on laser fine drilling have been evideutly improved. For filling O2 of working,the materlal voporigation threshold has been decreased, and the least order member of laser pulse for berakdown of working meterials als have been reduced