硅微加速度计及其集成测量系统研究

ilicon Micromachined Accelerometers and an Integrated Acceleration Measurement System

本文从加速度传感器军民两方面的需求出发,介绍了MEMS制造技术及国外采用MEMS加工技术研制的几种一维和三维硅加速度传感器,在此基础上研究了集成加速度测量系统及其工作原理。

The paper deals with the need for accelerometers in military and civilian. MEMS fabrication technology and a few of silicon micromachined accelerometers are introduced. The paper puts forward an integrated acceleration measurement system. The construction and working principle of the system are given.