摘要
本文用He-Ne激光器作光源,把电视摄相机(或CCD摄相机)和微机与泰曼-格林干涉仪结合,组成泰曼-电视-微机系统。利用法线象差补偿法检测非球面面形的原理,根据三个干涉图法,对非球面面形自动扫描、分析,并在计算机的监视器上绘制出被检非球面面形的二维等高线图和三维面形。为了扩大测试范围,设计了万能补偿器,可检测一定范围的抛物面,补偿精度可达0.01λ,也可检测椭圆面和双曲面。
In this paper, with He-Ne laser as a light source, a Twyman-TV-Computer system is composed of Twyman-green interferometer , TV camera and computer. With the theory of aspherical surface testing by normal aberration compensation method, according to 3-interferograms method, aspherical aurface is automatically scanned and analyzed. Then 2-D contour map and 3-D surface shape are drawed in a computer monitor. Designing a compensator to extense the testing range, it could be used to measure a certain range of paraboloids. The compenstion accuracy is more than 0. 01 r. In addtion, it also could be to measure some ellispsoids and hyperboloids.
出处
《测试技术学报》
1996年第3期448-452,共5页
Journal of Test and Measurement Technology
关键词
非球面
补偿法
摄相机
计算机
补偿精度
aspherical surface
compensation method
interferometor
TV camera
computer
compensation accuracy
