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Investigation on the initial stage of ion beam-deposited Fe and Cu films growth in situ

Investigation on the initial stage of ion beam-deposited Fe and Cu films growth in situ
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摘要 The initial stage of film growth is very important for the film structure, interface for-mation and properties. According to the results of research work on the initial stage forvacuum evaporation films, the following three growth models have been suggested: the lay-
出处 《Chinese Science Bulletin》 SCIE EI CAS 1996年第9期774-778,共5页
关键词 ion beam SPUTTERING INITIAL STAGE AUGER spectroscopy. ion beam sputtering initial stage Auger spectroscopy
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