摘要
The observation of structural changes in multilayers （MLs） has been used to study the interaction of materials at interface under nonequilibrium conditions, and to measure atomic diffusion rate and activation energies for compound formation. Cook and Hilliard have developed a technique which allows the measurement of small interdiffusivities down to 10<sup>-27</sup>m<sup>2</sup>·s<sup>-1</sup> by X-ray diffraction. Previous measurements are concentrated mainly on the crystalline metallic multilayers and amorphous metallic multilayers. To our knowledge, few interdiffusion measurements have been carried out for amorphous metallic-metalloid multilayers. As effective soft X-ray mirrors, Co/C multilayers have been successfully used in an X-ray telescope. Therefore, this note aims to report the interdiffusion of sputtered
基金
Project supported by the National Natural Science Foundation of China
Beijing Zhongguancun Associated Center of Analysis
Measurement.
