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A new way of fabricating luminescent silicon crystallites by excimer laser annealing of a-Si: H

A new way of fabricating luminescent silicon crystallites by excimer laser annealing of a-Si: H
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摘要 Si is an important material for manufacturing chips of microelectronic integrated circuits and transistors. Special Si devices can be used as the base materials for optical transmitters and detectors. However, as crystalline Si is an indirect band gap material and
出处 《Chinese Science Bulletin》 SCIE EI CAS 1996年第13期1079-1083,共5页
基金 Project supported by the National Natural Science Foundation of China the Natural Science Foundation of Jiangsu Province.
关键词 EXCIMER laser CRYSTALLIZATION NANO-SIZE Si. excimer laser crystallization nano-size Si
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