用于纳米级加工的特种加工技术

Non-conventional Machining Methods for Nano Machining

概要地论述了多种可用于纳米级微细加工的特种加工技术，诸如电子束加工、离子束加工、激光束加工、隧道式近场放电加工、微细电火花加工、微细电铸加工和复合加工等。论述了这些特种加工技术的基本原理和主要应用范围。

Non─conventional machining methods suitable for nano machining,such aselectron beam machining,ion beam machining,laser beam machining,tunnel electri-caldischarg machining,micro electrical discharge machining,micro electroforming and com-pound machining etc.are discussed.This paper also discusses the ultimate principles and themain field of application of these non-convetional machining methods.