纳米科学测量与传感技术

The Measurent and Sensor in Nanometer Scale Science

本文首先介绍了纳米测量技术的现状，纳米测量系统的三个主要部分即纳米传感技术；扫描测量系统；信息处理及图象分析技术，最后就纳米测量技术的前景题提出了看法。

Abstract The brief introduction of the state of nanometer scale measurement tech-nique is presented in the paper.The main field of nanometer measurement system:nanome-ter sensing technique;scanning measurement system;signal processing and image analysistechnique are described.Finally,The prospect of nanometer measurement technique and keyproblems which have to be researched in China are proposed.