隧道式分子级加工技术的研究

The Study of The Technology of Molecule Scale Machining with Tunneling Pattern

利用已经研制出的扫描隧道显微镜研究分子级加工装置，在纳米科技中纳米加工具有很广泛的意义。本文介绍了隧道式分子级加工的基本原理及加工装置的组成。初步探讨了隧道式分子级加工的加工要求和加工特点，使人们比较透彻地理解分子级加工需要解决和完善的有关技术。

Abstract The Scanning Tunneling Microscope having been developed,which isapplied to the study of the device of Molecule Scale Machining(MSM),means extensive toNano Machining of Nano ST.This paper describes the basic principle of MSM with Tunnel-ing Pattern,and the composition of the device of MSM. The machining requirement andcharacteristic of MSM with Tunneling Pattern are Preliminarily inquired into,lt’s clear tounderstand the technologies relevant to MSM,which are required to solve and perfect.