具有宽测量范围的扫描探针显微镜

Scanning Probe Microscope with Wide Measuring Range

本文介绍了具有宽测量范围（１４０×１４０μｍ２）的高灵敏度扫描探针显微镜，它能对Φ１３０ｍｍ的磁盘、光盘表面纳诺形貌和集成电路芯片光刻质量等进行多模式测量。本文给出了部分试验结果，如高定向石墨的原子图像与光栅和超精密磨削试件表面的纳米级形貌图。

Abstract The paper presents a scanning probe microscope with high sensitivity andwide measuring range(140×140μm2),which can measure the nanotophgraphy of substrateof magnetic disk and opticai disk,the lithgraphy quality of IC chips with the multiple mode.Some experimental results such as the atomic image of HOPG,the nanoscale topography ofgrating and superprecision ground surface are given in this paper.