纳米级润滑膜厚度测量研究

Study on the Measurement of Lubricant Film Thikness at Nanometer Scale

在超精密机械中，摩擦副（特别是点、线接触的摩擦副）常处于几个到几十纳米厚的薄膜润滑状态。由于测试技术上的困难，这种状态的润滑机理尚未得到充分的认识。本支介绍了根据光干涉法测膜的基本原理提出的相对光强原理，并经特定光路设计研制的ＮＧＹ－２型的纳米级润滑膜厚度测量仪。该测量仪具有膜厚测量分辨率及精度高和抗外界光场变化能力强等优点。

Abstract In thin film lubrication(film thickness is at nanometer scale),it is difficult tomeasure the film thickness. According to the principle of relative optical interference intensi-ty,a measurer that can real-time trace and measure oil film thicknesses and shapes atnanometer scaleis developed usirig a special optical system.Its resolution and measuring ac-curacy are better than those of other instruments of the same kind.Therefore,it lays thefoundation of the study on thin film lubrication inpoint contacts.