摘要
为了获得超平滑的石英晶体表面，本文讨论了超精密抛光中材料的去除机理，提出了微小表面粗糙度的基本形成模型。实验采用软质磨料微粉和软质沥青抛光盘，加工出表面粗糙度为１～２的石英晶体超精密表面，实现了超精密加工的极限精度。
Abstract To obtain super smooth surface of quartz Crystal,the material removalmechanism in the process of ultra precision polishing is discussed ,and the basic formationmodels of surface roughness is also put forward in this paper.The super smooth surfaces ofquartz crystal with 1～2 level roughness have been obtained by adopting the soft abrasivepowders and the soft pitch polisher in the experiments.The extreme precision machining hasCome true.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1995年第S1期181-186,共6页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金
中国博士后科学基金
国家教委优秀青年教师基金
浙江大学科研基金
