超光滑表面的离子束抛光与微观形貌检测

Ion Beam Polishing and Measuring Method on Supersmooth Surfaces

本文介绍了利用离子束抛光方法获得石英和单晶硅两种材料的超光滑表面，利用原子力显微镜（ＡＦＭ）进行该类表面微观形貌的测试工作。这种加工和测试可以在纳米尺度上进行。在合适的工艺参数条件下，我们已能获得微观形貌小于１ｎｍ（ｒｍｓ）的超光滑表面。

Abstract It is reported that we polish quatz and silicon surfaces using ion beam andmeasure the microstructure of these surfaces by Atomic Force rnicroscope(AFM).Thesekinds of polishing and Measurement can be done on nanometer scale.Under proper parame-ters we have got super-smooth surfaces,their micro irregularity less than 1nm(rms).