一种新型的超微针加工系统

A Novel Microtip Fabrication System

超微针是各种ＳＰＭ进行原子量级的测试及加工的测头和基础工具。本文提出了两项超微针控制加工新原理，建立了由微机进行实时监控的超微针加工系统。该加工系统具有简单、快速、成本低的优点，同时还可控制加工不同性能的超微针。

Abstract Microtip is the probe and the elementary tool for SPM to undertake mea-surement and fabrication on the atomic-scale.In this paper,two new microtip fabricationcontrolling principles are proposed.Based on the principles,a microtip fabrication system isdesigned.Microtips with different properties can be fabricated with high efficiency and lowCost.